Tailoring Artificial Mode to Enable Cofired Integration of Shear-type Piezoelectric Devices.

ABSTRACT: Low-temperature cofired ceramic technology is the prerequisite for producing advanced integrated piezoelectric devices that enable modern micro-electromechanical systems because of merits such as high level of compactness and ultralow drive voltage. However, piezoceramic structure with shear-type outputs, as a most fundamental functional electronic element, has never been successfully fabricated into multilayer form by the cofired method for decades. Technical manufacture requirements of parallel applied electric fields and polarization are theoretically incompatible with intrinsically orthogonal orientations in naturally occurring shear modes. Herein, inspired by the philosophy of building metamaterial from identical unit cells, an artificial prototype device with distinctive patterned el

SUBMITTER: Yang J 

PROVIDER: S-EPMC7507555 | biostudies-literature | 2020 Sep

REPOSITORIES: biostudies-literature