Ontology highlight
ABSTRACT:
SUBMITTER: Yang J
PROVIDER: S-EPMC7507555 | biostudies-literature | 2020 Sep
REPOSITORIES: biostudies-literature
Yang Jikun J Huan Qiang Q Yu Yang Y Wu Jingen J Chu Zhaoqiang Z PourhosseiniAsl MohammadJavad M Li Faxin F Dong Shuxiang S Dong Shuxiang S
Advanced science (Weinheim, Baden-Wurttemberg, Germany) 20200706 17
Low-temperature cofired ceramic technology is the prerequisite for producing advanced integrated piezoelectric devices that enable modern micro-electromechanical systems because of merits such as high level of compactness and ultralow drive voltage. However, piezoceramic structure with shear-type outputs, as a most fundamental functional electronic element, has never been successfully fabricated into multilayer form by the cofired method for decades. Technical manufacture requirements of paralle ...[more]