Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range.

ABSTRACT: Fabricating flexible pressure sensors with high sensitivity in a broad pressure range is still a challenge. Herein, a flexible pressure sensor with engineered microstructures on polydimethylsiloxane (PDMS) film is designed. The high performance of the sensor derives from its unique pyramid-wall-grid microstructure (PWGM). A square array of dome-topped pyramids and crossed strengthening walls on the film forms a multiheight hierarchical microstructure. Two pieces of PWGM flexible PDMS film, stacked face-to-face, form a piezoresistive sensor endowed with ultrahigh sensitivity across a very broad pressure range. The sensitivity of the device is as high as 383 665.9 and 269 662.9 kPa^-1 in the pressure ranges 0-1.6 and 1.6-6 kPa, respectively. In the higher pressure range of 6.1-11 k

SUBMITTER: Li G 

PROVIDER: S-EPMC7509712 | biostudies-literature | 2020 Sep

REPOSITORIES: biostudies-literature