Integration of Single Oriented Oxide Superlattices on Silicon Using Various Template Techniques.

ABSTRACT: To benefit from the diverse functionalities of perovskite oxides in silicon-based complementary metal oxide semiconductor (CMOS) technology, integrating oxides into a silicon platform has become one of the major tasks for oxide research. Using the deposition of LaMnO₃/SrTiO₃ (STO) superlattices (SLs) as a case study, we demonstrate that (001) single oriented oxide SLs can be integrated on Si using various template techniques, including a single-layer buffer of STO prepared by molecular beam epitaxy (MBE) and pulsed laser deposition, a multilayer buffer of Y-stabilized zirconia/CeO₂/LaNiO₃/STO, and STO-coated two-dimensional nanosheets of Ca₂Nb₃O₁₀ (CNO) and reduced graphene oxide. The textured SL grown on STO-coat

SUBMITTER: Chen B 

PROVIDER: S-EPMC7517711 | biostudies-literature | 2020 Sep

REPOSITORIES: biostudies-literature