Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor.

ABSTRACT: Ultra-precision piezoelectric inchworm motor (PIM) is widely used as optical equipment, in the microelectronics semiconductor industry, and in precision manufacturing for motion and positioning, but the multi-physics field simulation model for PIM performance estimation and assisting motor design is rarely studied. The simulation model in this paper aimed to provide researchers with direct and convenient PIM performance evaluation to assist the motor design and development. According to the existing advanced inchworm motor products, a multi-physics field coupling model involving solid mechanics and electrostatics using the finite element method (FEM) was established. The motion gesture and performance (driving force and travel) of the PIM were analyzed, respectively. The simulation results

SUBMITTER: Zhao B 

PROVIDER: S-EPMC7557391 | biostudies-literature | 2020 Sep

REPOSITORIES: biostudies-literature