Frequency Stabilization of Nanomechanical Resonators Using Thermally Invariant Strain Engineering.

ABSTRACT: Microfabricated mechanical resonators enable precision measurement techniques from atomic force microscopy to emerging quantum applications. The resonance frequency-based physical sensing combines high precision with long-term stability. However, widely used Si₃N₄ resonators suffer from frequency sensitivity to temperature due to the differential thermal expansion vs the Si substrates. Here we experimentally demonstrate temperature- and residual stress-insensitive 16.51 MHz tuning fork nanobeam resonators with nonlinear clamps defining the stress and frequency by design, achieving a low fractional frequency sensitivity of (2.5 ± 0.8) × 10^-6 K^-1, a 72× reduction. On-chip optical readout of resonator thermomechanical fluctuations allows precision f

SUBMITTER: Wang M 

PROVIDER: S-EPMC7558603 | biostudies-literature | 2020 May

REPOSITORIES: biostudies-literature