Electron beam-induced deposition of platinum from Pt(CO)₂Cl₂ and Pt(CO)₂Br₂.

ABSTRACT: Two platinum precursors, Pt(CO)₂Cl₂ and Pt(CO)₂Br₂, were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition experiments in a scanning electron microscope (SEM), wherein series of pillars were successfully grown from both precursors. The growth of the pillars was studied as a function of the electron dose and compared to deposits grown from the commercially available precursor MeCpPtMe₃. The composition of the deposits was determined using energy-dispersive X-ray spectroscopy (EDX) and compared to the composition of deposits from MeCpPtMe₃, as well a

SUBMITTER: Mahgoub A 

PROVIDER: S-EPMC7705861 | biostudies-literature | 2020

REPOSITORIES: biostudies-literature