Thermal Stability of Titanium Contacts to MoS₂.

ABSTRACT: Thermal annealing of Ti contacts is commonly implemented in the fabrication of MoS₂ devices; however, its effects on interface chemistry have not been previously reported in the literature. In this work, the thermal stability of titanium contacts deposited on geological bulk single crystals of MoS₂ in ultrahigh vacuum (UHV) is investigated with X-ray photoelectron spectroscopy and scanning transmission electron microscopy (STEM). In the as-deposited condition, the reaction of Ti with MoS₂ is observed resulting in a diffuse interface between the two materials that comprises metallic molybdenum and titanium sulfide compounds. Annealing Ti/MoS₂ sequentially at 100, 300, and 600 °C for 30 min in UHV results in a gradual increase in the reaction produ

SUBMITTER: Freedy KM 

PROVIDER: S-EPMC7717568 | biostudies-literature | 2019 Sep

REPOSITORIES: biostudies-literature