Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector.

ABSTRACT: A detection system based on a microchannel plate with a delay line readout structure has been developed to perform scanning transmission ion microscopy (STIM) in the helium ion microscope (HIM). This system is an improvement over other existing approaches since it combines the information of the scanning beam position on the sample with the position (scattering angle) and time of the transmission events. Various imaging modes, such as bright field and dark field or the direct image of the transmitted signal, can be created by post-processing the collected STIM data. Furthermore, the detector has high spatial and temporal resolution, is sensitive to both ions and neutral particles over a wide energy range, and shows robustness against ion beam-induced damage. A special in-vacuum movable sup

SUBMITTER: Serralta E 

PROVIDER: S-EPMC7736698 | biostudies-literature | 2020

REPOSITORIES: biostudies-literature