Clean-Room Lithographical Processes for the Fabrication of Graphene Biosensors.

ABSTRACT: This work is on developing clean-room processes for the fabrication of electrolyte-gate graphene field-effect transistors at the wafer scale for biosensing applications. Our fabrication process overcomes two main issues: removing surface residues after graphene patterning and the dielectric passivation of metallic contacts. A graphene residue-free transfer process is achieved by using a pre-transfer, sacrificial metallic mask that protects the entire wafer except the areas around the channel, source, and drain, onto which the graphene film is transferred and later patterned. After the dissolution of the mask, clean gate electrodes are obtained. The multilayer SiO₂/SiN_x dielectric passivation takes advantage of the excellent adhesion of SiO₂ to graphene and

SUBMITTER: Cabral PD 

PROVIDER: S-EPMC7765539 | biostudies-literature | 2020 Dec

REPOSITORIES: biostudies-literature