Influence of Sr deficiency on structural and electrical properties of SrTiO₃ thin films grown by metal-organic vapor phase epitaxy.

ABSTRACT: Homoepitaxial growth of SrTiO₃ thin films on 0.5 wt% niobium doped SrTiO₃ (100) substrates with high structural perfection was developed using liquid-delivery spin metal-organic vapor phase epitaxy (MOVPE). Exploiting the advantage of adjusting the partial pressures of the individual constituents independently, we tuned the Sr/Ti ratio of the gas phase for realizing, stoichiometric, as well as Sr deficient layers. Quantitative energy dispersive X-ray spectroscopy in a scanning transmission electron microscope confirm Sr deficiency of up to 20% in nominally off-stoichiometrically grown films. Our MOVPE process allows to grow such layers in phase pure state and without extended defect formation. Indications for oxygen deficiency could not be identified. Sr deficient lay

SUBMITTER: Baki A 

PROVIDER: S-EPMC8021553 | biostudies-literature | 2021 Apr

REPOSITORIES: biostudies-literature