Microscopic evidence of strong interactions between chemical vapor deposited 2D MoS₂ film and SiO₂ growth template.

ABSTRACT: Two-dimensional MoS₂ film can grow on oxide substrates including Al₂O₃ and SiO₂. However, it cannot grow usually on non-oxide substrates such as a bare Si wafer using chemical vapor deposition. To address this issue, we prepared as-synthesized and transferred MoS₂ (AS-MoS₂ and TR-MoS₂) films on SiO₂/Si substrates and studied the effect of the SiO₂ layer on the atomic and electronic structure of the MoS₂ films using spherical aberration-corrected scanning transition electron microscopy (STEM) and electron energy loss spectroscopy (EELS). The interlayer distance between MoS₂ layers film showed a change at the AS-MoS₂/SiO₂ interface, which is attribute

SUBMITTER: Sohn W 

PROVIDER: S-EPMC8032840 | biostudies-literature | 2021 Apr

REPOSITORIES: biostudies-literature