Exploring the fabrication and transfer mechanism of metallic nanostructures on carbon nanomembranes via focused electron beam induced processing.

ABSTRACT: Focused electron beam-induced processing is a versatile method for the fabrication of metallic nanostructures with arbitrary shape, in particular, on top of two-dimensional (2D) organic materials, such as self-assembled monolayers (SAMs). Two methods, namely electron beam-induced deposition (EBID) and electron beam-induced surface activation (EBISA) are studied with the precursors Fe(CO)₅ and Co(CO)₃NO on SAMs of 1,1',4',1''-terphenyl-4-thiol (TPT). For Co(CO)₃NO only EBID leads to deposits consisting of cobalt oxide. In the case of Fe(CO)₅ EBID and EBISA yield deposits consisting of iron nanocrystals with high purity. Remarkably, the EBISA process exhibits a strong time dependence, which is analyzed in detail for different electron doses. This t

SUBMITTER: Preischl C 

PROVIDER: S-EPMC8042486 | biostudies-literature | 2021

REPOSITORIES: biostudies-literature