Operando Study of Thermal Oxidation of Monolayer MoS₂.

ABSTRACT: Monolayer MoS₂ is a promising semiconductor to overcome the physical dimension limits of microelectronic devices. Understanding the thermochemical stability of MoS₂ is essential since these devices generate heat and are susceptible to oxidative environments. Herein, the promoting effect of molybdenum oxides (MoO _x ) particles on the thermal oxidation of MoS₂ monolayers is shown by employing operando X-ray absorption spectroscopy, ex situ scanning electron microscopy and X-ray photoelectron spectroscopy. The study demonstrates that chemical vapor deposition-grown MoS₂ monolayers contain intrinsic MoO _x and are quickly oxidized at 100 °C (3 vol% O₂/He), in contrast to previously reported oxidation thre

SUBMITTER: Park S 

PROVIDER: S-EPMC8097340 | biostudies-literature | 2021 May

REPOSITORIES: biostudies-literature