Metastable Ta₂N₃ with highly tunable electrical conductivity via oxygen incorporation.

ABSTRACT: The binary Ta-N chemical system includes several compounds with notable prospects in microelectronics, solar energy harvesting, and catalysis. Among these, metallic TaN and semiconducting Ta₃N₅ have garnered significant interest, in part due to their synthetic accessibility. However, tantalum sesquinitride (Ta₂N₃) possesses an intermediate composition and largely unknown physical properties owing to its metastable nature. Herein, Ta₂N₃ is directly deposited by reactive magnetron sputtering and its optoelectronic properties are characterized. Combining these results with density functional theory provides insights into the critical role of oxygen in both synthesis and electronic structure. While the inclusion of oxygen in the

SUBMITTER: Jiang CM 

PROVIDER: S-EPMC8186396 | biostudies-literature | 2021 Jun

REPOSITORIES: biostudies-literature