Inkjet Printing of a Benzocyclobutene-Based Polymer as a Low-k Material for Electronic Applications.

ABSTRACT: Polymeric materials with a low dielectric constant are widely used in the electronic industry due to their properties. In particular, polymer adhesives can be used in many applications such as wafer bonding and three-dimensional integration. Benzocyclobutene (BCB) is a very interesting material thanks to its excellent bonding behavior and dielectric properties. Usually, BCB is applied by spin-coating, although this technology does not allow the fabrication of complex patterns. To obtain complex patterns, it is necessary to use a printing technology, such as inkjet printing. However, inkjet printing of BCB-based inks has not yet been investigated. Here, we show the feasibility of printing complex patterns with a BCB-based ink, reaching a resolution of 130 μm. We demonstrate that with a prop

SUBMITTER: Iervolino F 

PROVIDER: S-EPMC8223404 | biostudies-literature | 2021 Jun

REPOSITORIES: biostudies-literature