Toward applications of near-field radiative heat transfer with micro-hotplates.

ABSTRACT: Bringing bodies close together at sub-micron distances can drastically enhance radiative heat transfer, leading to heat fluxes greater than the blackbody limit set by Stefan-Boltzmann law. This effect, known as near-field radiative heat transfer (NFRHT), has wide implications for thermal management in microsystems, as well as technological applications such as direct heat to electricity conversion in thermophotovoltaic cells. Here, we demonstrate NFRHT from microfabricated hotplates made by surface micromachining of [Formula: see text]/[Formula: see text] thin films deposited on a sacrificial amorphous Si layer. The sacrificial layer is dry etched to form wide membranes ([Formula: see text]) separated from the substrate by nanometric distances. Nickel traces allow both resistive heating an

SUBMITTER: Marconot O 

PROVIDER: S-EPMC8275596 | biostudies-literature | 2021 Jul

REPOSITORIES: biostudies-literature