Selective Vacuum Evaporation by the Control of the Chemistry of Gas Phase in Vacuum Refining of Si.

ABSTRACT: The evaporation of P from liquid Si under vacuum and reduced pressures of H₂, He, and Ar was studied to evaluate the feasibility of effective P removal with insignificant Si loss. It was found that the introduction of Ar and He inert gases at low pressures reduces the rate of P removal, and their pressure decrease will increase the process rate. Moreover, the kinetics of P removal was higher in He than in Ar, with simultaneous lower Si loss. Under reduced pressures of H₂ gas, however, the P removal rate was higher than that under vacuum conditions with the lowest Si loss. Quantum chemistry and dynamics simulations were applied, and the results indicated that P can maintain its momentum for longer distances in H₂ once it is evaporated from the melt surface a

SUBMITTER: Hoseinpur A 

PROVIDER: S-EPMC8280733 | biostudies-literature | 2021 Jun

REPOSITORIES: biostudies-literature