Exploring the First High-Entropy Thin Film Libraries: Composition Spread-Controlled Crystalline Structure.

ABSTRACT: Thin films of two types of high-entropy oxides (HEOs) have been deposited on 76.2 mm Si wafers using combinatorial sputter deposition. In one type of the oxides, (MgZnMnCoNi)O_x, all the metals have a stable divalent oxidation state and similar cationic radii. In the second type of oxides, (CrFeMnCoNi)O_x, the metals are more diverse in the atomic radius and valence state, and have good solubility in their sub-binary and ternary oxide systems. The resulting HEO thin films were characterized using several high-throughput analytical techniques. The microstructure, composition, and electrical conductivity obtained on defined grid maps were obtained for the first time across large compositional ranges. The crystalline structure of the films was observed as a f

SUBMITTER: Nguyen TX 

PROVIDER: S-EPMC8415495 | biostudies-literature | 2020 Dec

REPOSITORIES: biostudies-literature