On-chip parallel Fourier transform spectrometer for broadband selective infrared spectral sensing.

ABSTRACT: Optical spectrometers enable contactless chemical analysis. However, decreasing both their size and cost appears to be a prerequisite to their widespread deployment. Chip-scale implementation of optical spectrometers still requires tackling two main challenges. First, operation over a broad spectral range extending to the infrared is required to enable covering the molecular absorption spectrum of a broad variety of materials. This is addressed in our work with an Micro-Electro Mechanical Systems (MEMS)-based Fourier transform infrared spectrometer with an embedded movable micro-mirror on a silicon chip. Second, fine spectral resolution Δλ is also required to facilitate screening over several chemicals. A fundamental limit states that Δλ is inversely proportional to the mirro

SUBMITTER: Fathy A 

PROVIDER: S-EPMC8433235 | biostudies-literature | 2020

REPOSITORIES: biostudies-literature