Is the Ne operation of the helium ion microscope suitable for electron backscatter diffraction sample preparation?

ABSTRACT: Electron backscatter diffraction (EBSD) is a powerful characterization technique which allows the study of microstructure, grain size, and orientation as well as strain of a crystallographic sample. In addition, the technique can be used for phase analysis. A mirror-flat sample surface is required for this analysis technique and different polishing approaches have been used over the years. A commonly used approach is the focused ion beam (FIB) polishing. Unfortunately, artefacts that can be easily induced by Ga FIB polishing approaches are seldom published. This work aims to provide a better understanding of the underlying causes for artefact formation and to assess if the helium ion microscope is better suited to achieve the required mirror-flat sample surface when operating the ion sourc

SUBMITTER: Wolff A 

PROVIDER: S-EPMC8450971 | biostudies-literature | 2021

REPOSITORIES: biostudies-literature