0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection.

ABSTRACT: Whole-angle gyroscopes have broad prospects for development with inherent advantages of excellent scale factor, wide bandwidth and measurement range, which are restrictions on rate gyroscopes. Previous studies on the whole-angle mode are based mostly on the linear model of Lynch, and the essential nonlinearity of capacitive displacement detection is always neglected, which has significant negative effects on the performance. In this paper, a novel real-time calibration method of capacitive displacement detection is proposed to eliminate these nonlinear effects. This novel method innovatively takes advantage of the relationship between the first and third harmonic components of detective signals for calibration. Based on this method, the real-time calibration of capacitive displacement dete

SUBMITTER: Sun J 

PROVIDER: S-EPMC8514555 | biostudies-literature | 2021

REPOSITORIES: biostudies-literature