Burger Model as the Best Option for Modeling of Viscoelastic Behavior of Resists for Nanoimprint Lithography.

ABSTRACT: In this study, Atomic Force Microscopy-based nanoindentation (AFM-NI) with diamond-like carbon (DLC) coated tip was used to analyze the mechanical response of poly(methyl methacrylate) (PMMA) thin films (thicknesses: 235 and 513 nm) on a silicon substrate. Then, Oliver and Pharr (OP) model was used to calculate hardness and Young's modulus, while three different Static Linear Solid models were used to fit the creep curve and measure creep compliance, Young's modulus, and viscosity. Values were compared with each other, and the best-suited method was suggested. The impact of four temperatures below the glass transition temperature and varied indentation depth on the mechanical properties has been analyzed. The results show high sensitivity on experiment parameters and there is a clear diffe

SUBMITTER: Grzywacz H 

PROVIDER: S-EPMC8587944 | biostudies-literature | 2021 Nov

REPOSITORIES: biostudies-literature