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Chip-scale optical airflow sensor.

ABSTRACT: Airflow sensors are an essential component in a wide range of industrial, biomedical, and environmental applications. The development of compact devices with a fast response and wide measurement range capable of in situ airflow monitoring is highly desirable. Herein, we report a miniaturized optical airflow sensor based on a GaN chip with a flexible PDMS membrane. The compact GaN chip is responsible for light emission and photodetection. The PDMS membrane fabricated using a droplet-based molding process can effectively transform the airflow stimuli into optical reflectance changes that can be monitored by an on-chip photodetector. Without the use of external components for light coupling, the proposed sensor adopting the novel integration scheme is capable of detecting airflow rates of up to 53.5 ms^-1 and exhibits a fast response time of 12 ms, holding great promise for diverse practical applications. The potential use in monitoring human breathing is also demonstrated.

SUBMITTER: Luo Y

PROVIDER: S-EPMC8724291 | biostudies-literature | 2022

REPOSITORIES: biostudies-literature

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Chip-scale optical airflow sensor.

Luo Yumeng Y An Xiaoshuai X Chen Liang L Li Kwai Hei KH

Microsystems & nanoengineering 20220104

Airflow sensors are an essential component in a wide range of industrial, biomedical, and environmental applications. The development of compact devices with a fast response and wide measurement range capable of in situ airflow monitoring is highly desirable. Herein, we report a miniaturized optical airflow sensor based on a GaN chip with a flexible PDMS membrane. The compact GaN chip is responsible for light emission and photodetection. The PDMS membrane fabricated using a droplet-based molding ...[more]

PMID: 35047209

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