ToF-SIMS Depth Profiling of Metal, Metal Oxide, and Alloy Multilayers in Atmospheres of H₂, C₂H₂, CO, and O₂.

ABSTRACT: The influence of the flooding gas during ToF-SIMS depth profiling was studied to reduce the matrix effect and improve the quality of the depth profiles. The profiles were measured on three multilayered samples prepared by PVD. They were composed of metal, metal oxide, and alloy layers. Dual-beam depth profiling was performed with 1 keV Cs⁺ and 1 keV O₂⁺ sputter beams and analyzed with a Bi⁺ primary beam. The novelty of this work was the application of H₂, C₂H₂, CO, and O₂ atmospheres during SIMS depth profiling. Negative cluster secondary ions, formed from sputtered metals/metal oxides and the flooding gases, were analyzed. A systematic comparison and evaluation of the ToF-SIMS depth profiles were perfo

SUBMITTER: Ekar J 

PROVIDER: S-EPMC8739835 | biostudies-literature | 2022 Jan

REPOSITORIES: biostudies-literature