Highly Sensitive NO₂ Detection by TVS-Grown Multilayer MoS₂ Films.

ABSTRACT: Two-dimensional layered materials have been investigated for sensor applications over the last decade due to their very high specific surface area and excellent electrical characteristics. Although grain boundaries are inevitably present in polycrystalline-layered materials used for real applications, few studies have investigated their effects on sensing properties. In this study, we demonstrate the growth of two distinct MoS₂ films that differ in grain size by means of chemical vapor deposition (CVD) and thermal vapor sulfurization (TVS) methods. Transistor-based sensors are fabricated using these films, and their NO₂ sensing properties are evaluated. The adsorption behavior of NO₂ on MoS₂ is considered in terms of the Langmuir isotherm, and th

SUBMITTER: Hayashi K 

PROVIDER: S-EPMC8771694 | biostudies-literature | 2022 Jan

REPOSITORIES: biostudies-literature