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Polymer interdigitated pillar electrostatic (PIPE) actuators.


ABSTRACT: This work reports a three-dimensional polymer interdigitated pillar electrostatic actuator that can produce force densities 5-10× higher than those of biological muscles. The theory of operation, scaling, and stability is investigated using analytical and FEM models. The actuator consists of two high-density arrays of interdigitated pillars that work against a restoring force generated by an integrated flexure spring. The actuator architecture enables linear actuation with higher displacements and pull-in free actuation to prevent the in-use stiction associated with other electrostatic actuators. The pillars and springs are 3D printed together in the same structure. The pillars are coated with a gold-palladium alloy layer to form conductive electrodes. The space between the pillars is fill

SUBMITTER: Ni D 

PROVIDER: S-EPMC8801513 | biostudies-literature | 2022

REPOSITORIES: biostudies-literature