Thin films of the [Formula: see text]-quartz [Formula: see text] solid solution.

ABSTRACT: [Formula: see text] with the [Formula: see text]-quartz structure is one of the most popular piezoelectrics. It is widely used in crystal oscillators, bulk acoustic wave (BAW) devices, surface acoustic wave (SAW) devices, and so on. [Formula: see text] can also be crystallized into the [Formula: see text]-quartz structure and it has better piezoelectric properties, with higher piezoelectric coefficient and electromechanical coupling coefficients, than [Formula: see text]. Experiments on bulk crystals and theoretical studies have shown that these properties can be tuned by varying the Si/Ge ratio in the [Formula: see text] solid solution. However, to the best of our knowledge, thin films of [Formula: see text] quartz have never been reported. Here we present the successful crystallization o

SUBMITTER: Zhou S 

PROVIDER: S-EPMC8821611 | biostudies-literature | 2022 Feb

REPOSITORIES: biostudies-literature