Ontology highlight
ABSTRACT:
SUBMITTER: Tanaka H
PROVIDER: S-EPMC8822459 | biostudies-literature | 2022
REPOSITORIES: biostudies-literature
Tanaka Hiroya H Ohno Shinya S Miki Kazushi K Tanaka Masatoshi M
Beilstein journal of nanotechnology 20220203
Thermal oxidation of Si(113) in a monolayer regime was investigated using high-temperature scanning tunneling microscopy (STM). Dynamic processes during thermal oxidation were examined in three oxidation modes - oxidation, etching, and transition modes - in the third of which both oxidation and etching occur. A precise temperature-pressure growth mode diagram was obtained via careful measurements for Si(113), and the results were compared with those for Si(111) in the present work and Si(001) in ...[more]