Deep learning in optical metrology: a review.

ABSTRACT: With the advances in scientific foundations and technological implementations, optical metrology has become versatile problem-solving backbones in manufacturing, fundamental research, and engineering applications, such as quality control, nondestructive testing, experimental mechanics, and biomedicine. In recent years, deep learning, a subfield of machine learning, is emerging as a powerful tool to address problems by learning from data, largely driven by the availability of massive datasets, enhanced computational power, fast data storage, and novel training algorithms for the deep neural network. It is currently promoting increased interests and gaining extensive attention for its utilization in the field of optical metrology. Unlike the traditional "physics-based" approach, deep-learnin

SUBMITTER: Zuo C 

PROVIDER: S-EPMC8866517 | biostudies-literature | 2022 Feb

REPOSITORIES: biostudies-literature