Contribution of Dislocations in SiC Seed Crystals on the Melt-Back Process in SiC Solution Growth.

ABSTRACT: The melt-back process has a significant effect on the quality of solution-grown SiC crystals. However, the phenomena surrounding the SiC dissolution into the molten alloy during the melt-back process have not been clarified. In this study, the behavior of 4H-SiC dissolution into molten alloy was investigated by using high-temperature in situ observation and subsequent KOH etching, and the effects of different doping conditions and crystal polarity were studied. Local dissolutions with hexagonal pyramid-shape originating from threading screw dislocation (TSD) were observed on the C face of n-type SiC with light nitrogen doping. Our analysis of their behavior revealed that the process was governed by the spiral dissolution. In addition to the dissolution at TSD, local dissolutions at threadi

SUBMITTER: Kawanishi S 

PROVIDER: S-EPMC8911462 | biostudies-literature | 2022 Feb

REPOSITORIES: biostudies-literature