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A two-step chemical vapor deposition process for the growth of continuous vertical heterostructure WSe2/h-BN and its optical properties.


ABSTRACT: The expansion of two-dimensional (2D) van der Waals heterostructure materials growth and synthesis leads to impressive results in the development and improvement of electronic and optoelectronic applications. Herein, a vertical WSe2/hBN heterostructure was obtained via a dual CVD system, in which prior to the WSe2 growth a continuous monolayer hBN was obtained on a SiO2/Si substrate. Comparing growth on SiO2/Si and quartz substrates, we found that the underlayer of hBN leads to a desorption/diffusion process of tungsten (W) and selenium (Se) producing high-quality and large-area WSe2 growth. In contrast with WSe2/SiO2 and WSe2/quartz heterostructures, the photoluminescence properties of WSe2/hBN exhibit a sharp intense WSe2 peak at 790 nm with a narrow full width at half-maximum (80 meV) due to no dangling bonds and dielectric effect of the hBN interface. The photoluminescence results suggest that the WSe2/hBN heterostructure has high crystallinity with a defect-free interface.

SUBMITTER: Alahmadi M 

PROVIDER: S-EPMC9032247 | biostudies-literature | 2021 May

REPOSITORIES: biostudies-literature

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A two-step chemical vapor deposition process for the growth of continuous vertical heterostructure WSe<sub>2</sub>/h-BN and its optical properties.

Alahmadi M M   Mahvash F F   Szkopek T T   Siaj M M  

RSC advances 20210507 28


The expansion of two-dimensional (2D) van der Waals heterostructure materials growth and synthesis leads to impressive results in the development and improvement of electronic and optoelectronic applications. Herein, a vertical WSe<sub>2</sub>/hBN heterostructure was obtained <i>via</i> a dual CVD system, in which prior to the WSe<sub>2</sub> growth a continuous monolayer hBN was obtained on a SiO<sub>2</sub>/Si substrate. Comparing growth on SiO<sub>2</sub>/Si and quartz substrates, we found th  ...[more]

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