Study of deposition parameters and growth kinetics of ZnO deposited by aerosol assisted chemical vapor deposition.

ABSTRACT: Aerosol-assisted Chemical Vapor Deposition (AACVD) is a thermally activated CVD technique that uses micro-droplets as deposition precursors. An AACVD system with a custom-designed reaction chamber has been implemented to grow ZnO thin films using zinc chloride as a precursor. The present work aims to study the impact of the deposition parameters on the thin film, as well as the microstructure evolution and growth kinetics. Aerosol flow has an effect on the density of nucleation sites and on the grain size. The temperature affects the morphology of the grown ZnO, showing a preferential orientation along the c-axis for 350 °C, 375 °C and 400 °C substrate temperatures. The microstructural evolution and the growth kinetics are also presented. A different evolution behavior has been obse

SUBMITTER: Sanchez-Martin S 

PROVIDER: S-EPMC9033435 | biostudies-literature | 2021 May

REPOSITORIES: biostudies-literature