Correlative AFM and Scanning Microlens Microscopy for Time-Efficient Multiscale Imaging.

ABSTRACT: With the rapid evolution of microelectronics and nanofabrication technologies, the feature sizes of large-scale integrated circuits continue to move toward the nanoscale. There is a strong need to improve the quality and efficiency of integrated circuit inspection, but it remains a great challenge to provide both rapid imaging and circuit node-level high-resolution images simultaneously using a conventional microscope. This paper proposes a nondestructive, high-throughput, multiscale correlation imaging method that combines atomic force microscopy (AFM) with microlens-based scanning optical microscopy. In this method, a microlens is coupled to the end of the AFM cantilever and the sample-facing side of the microlens contains a focused ion beam deposited tip which serves as the AFM scanning

SUBMITTER: Zhang T 

PROVIDER: S-EPMC9036010 | biostudies-literature | 2022 Apr

REPOSITORIES: biostudies-literature