Layered Si-Ti oxide thin films with tailored electrical and optical properties by catalytic tandem MLD-ALD.

ABSTRACT: Oxides with well-controlled optical and electrical properties are key for numerous advances in nanotechnology, including energy, catalysis, sensors, and device applications. In this study we introduce layer-by-layer deposition of silicon-titanium layered oxide (Si-Ti LO) thin films using combined MLD-ALD methodology (M/ALD). The Si-Ti LO film deposition is achieved by acid-base catalysis establishing an overall catalytic tandem M/ALD super cycle (CT-M/ALD). The catalytic nature of the process allows relatively fast deposition cycles under mild conditions compared with the typical cycle time and conditions required for ALD processes with silane precursors. The Si-Ti LO thin films exhibit tuneable refractive index and electrical conductivities. The refractive index is set by the stoichiometr

SUBMITTER: Kalderon B 

PROVIDER: S-EPMC9042836 | biostudies-literature | 2021 Oct

REPOSITORIES: biostudies-literature