Fabrication of black aluminium thin films by magnetron sputtering.

ABSTRACT: Black aluminium thin films were prepared by direct current (DC) pulsed magnetron sputtering. The N₂ concentration in the Ar-N₂ mixture that was used as the deposition atmosphere was varied from 0 to 10%, and its impact on the film growth and optical properties was studied. A strong change in the film growth process was observed as a function of the N₂ concentration. At a specific N₂ concentration of ∼6%, the Al film growth process favoured the formation of a moth-eye-like antireflective surface. This surface morphology, which was similar to the structure of a cauliflower, is known to trap incident light, resulting in films with a very low reflectivity. A diffuse reflectivity lower than 4% was reached in the ultraviolet-visible-near infrared (UV-V

SUBMITTER: More-Chevalier J 

PROVIDER: S-EPMC9054304 | biostudies-literature | 2020 May

REPOSITORIES: biostudies-literature