Ontology highlight
ABSTRACT:
SUBMITTER: Choi EY
PROVIDER: S-EPMC9063401 | biostudies-literature | 2019 Apr
REPOSITORIES: biostudies-literature
RSC advances 20190415 21
A method for enhancing the moisture barrier property of polydimethylsiloxane (PDMS) polymer films is proposed. This is achieved by filling the PDMS free volume with aluminum oxide (AlO <sub><i>x</i></sub> ). To deposit AlO <sub><i>x</i></sub> inside PDMS, thermal atomic layer deposition (ALD) is employed. The PDMS/AlO <sub><i>x</i></sub> film thus produced has a 30 nm AlO <sub><i>x</i></sub> layer on the surface. Its water vapor transmission rate (WVTR) is 5.1 × 10<sup>-3</sup> g m<sup>-2</sup> ...[more]