PCA-based sub-surface structure and defect analysis for germanium-on-nothing using nanoscale surface topography.

ABSTRACT: Empty space in germanium (ESG) or germanium-on-nothing (GON) are unique self-assembled germanium structures with multiscale cavities of various morphologies. Due to their simple fabrication process and high-quality crystallinity after self-assembly, they can be applied in various fields including micro-/nanoelectronics, optoelectronics, and precision sensors, to name a few. In contrast to their simple fabrication, inspection is intrinsically difficult due to buried structures. Today, ultrasonic atomic force microscopy and interferometry are some prevalent non-destructive 3-D imaging methods that are used to inspect the underlying ESG structures. However, these non-destructive characterization methods suffer from low throughput due to slow measurement speed and limited measurable thickness.

SUBMITTER: Jeong J 

PROVIDER: S-EPMC9065006 | biostudies-literature | 2022 May

REPOSITORIES: biostudies-literature