Multiphoton Nanosculpting of Optical Resonant and Nonresonant Microsensors on Fiber Tips.

ABSTRACT: This work presents a multiphoton nanosculpting process that is employed to fabricate three-dimensional (3D) mechanically assisted optical resonant and nonresonant microsensors on fiber tips. The resonant microsensor consists of a complex 3D optical cavity design with submicron resolution and advanced micromechanical features including a hinged, multipositional mirror, a 3D spring body to displace this mirror without deforming it, and adhesive-retaining features for sealing the cavity. These features represent a breakthrough in the integration and fabrication capabilities of micro-optomechanical systems. The demonstrated dynamic optical surface enables directional thin-film deposition onto obscured areas. We leverage the rotation of the dynamically movable mirror to deposit a thin reflectiv

SUBMITTER: Williams JC 

PROVIDER: S-EPMC9073840 | biostudies-literature | 2022 May

REPOSITORIES: biostudies-literature