Single-shot femtosecond bulk micromachining of silicon with mid-IR tightly focused beams.

ABSTRACT: Being the second most abundant element on earth after oxygen, silicon remains the working horse for key technologies for the years. Novel photonics platform for high-speed data transfer and optical memory demands higher flexibility of the silicon modification, including on-chip and in-bulk inscription regimes. These are deepness, three-dimensionality, controllability of sizes and morphology of created modifications. Mid-IR (beyond 4 µm) ultrafast lasers provide the required control for all these parameters not only on the surface (as in the case of the lithographic techniques), but also inside the bulk of the semiconductor, paving the way to an unprecedented variety of properties that can be encoded via such an excitation. We estimated the deposited energy density as 6 kJ cm^-3 i

SUBMITTER: Mareev E 

PROVIDER: S-EPMC9079093 | biostudies-literature | 2022 May

REPOSITORIES: biostudies-literature