AFM-thermoreflectance for simultaneous measurements of the topography and temperature.

ABSTRACT: To understand the thermal failure mechanisms of electronic devices, it is essential to measure the temperature and characterize the thermal properties of individual nanometer-scale transistors in electronic devices. Previously, scanning thermal microscopy (SThM) has been used to measure the local temperature with nanometer-scale spatial resolutions using a probe with a built-in temperature sensor. However, this type of temperature measurement requires additional equipment to process the temperature-sensing signals and expensive temperature-sensor-integrated probes fabricated by complicated MEMS processes. Here, we present a novel technique which enables the simultaneous measurement of the temperature and topography of nanostructures only with a conventional atomic force microscope (AFM) of

SUBMITTER: Rho J 

PROVIDER: S-EPMC9083913 | biostudies-literature | 2018 Aug

REPOSITORIES: biostudies-literature