Ontology highlight
ABSTRACT:
SUBMITTER: Phan HP
PROVIDER: S-EPMC9085268 | biostudies-literature | 2018 Aug
REPOSITORIES: biostudies-literature
Phan Hoang-Phuong HP Dowling Karen M KM Nguyen Tuan-Khoa TK Chapin Caitlin A CA Dinh Toan T Miller Ruth A RA Han Jisheng J Iacopi Alan A Senesky Debbie G DG Dao Dzung Viet DV Nguyen Nam-Trung NT
RSC advances 20180824 52
This paper reports on the piezoresistive effect in p-type 3C-SiC thin film mechanical sensing at cryogenic conditions. Nanothin 3C-SiC films with a carrier concentration of 2 × 10<sup>19</sup> cm<sup>-3</sup> were epitaxially grown on a Si substrate using the LPCVD process, followed by photolithography and UV laser engraving processes to form SiC-on-Si pressure sensors. The magnitude of the piezoresistive effect was measured by monitoring the change of the SiC conductance subjected to pressurizi ...[more]