Dataset Information

Solution-processed amorphous ZrO₂ gate dielectric films synthesized by a non-hydrolytic sol-gel route.

ABSTRACT: Solution-processed zirconium oxide (ZrO₂) dielectrics were formed via a non-hydrolytic sol-gel route at low-temperature, and are suitable for flexible thin film transistor (TFT) devices. Precursor solutions with equimolar zirconium halide and zirconium alkoxide were prepared, and amorphous ZrO₂ films were obtained by spin-coating and annealing at 300 °C through the direct condensation reaction between them. The ZrO₂ films exhibited a high dielectric constant near 10, and a low leakage current density of 5 × 10^-8 A cm^-2 at a field of 1 MV cm^-1. High mobility p-type pentacene TFTs were fabricated using the ZrO₂ dielectrics, with a saturation field-effect mobility of 3.7 cm² V^-1 s^-1<

SUBMITTER: Seon JB

PROVIDER: S-EPMC9090666 | biostudies-literature | 2018 Nov

REPOSITORIES: biostudies-literature

ACCESS DATA

Dataset Information

Solution-processed amorphous ZrO₂ gate dielectric films synthesized by a non-hydrolytic sol-gel route.

OmicsDI is part of the ELIXIR infrastructure

Tweets

Dataset Information

Solution-processed amorphous ZrO2 gate dielectric films synthesized by a non-hydrolytic sol-gel route.

OmicsDI is part of the ELIXIR infrastructure

Tweets

Solution-processed amorphous ZrO₂ gate dielectric films synthesized by a non-hydrolytic sol-gel route.