Polyimide-Based High-Performance Film Bulk Acoustic Resonator Humidity Sensor and Its Application in Real-Time Human Respiration Monitoring.

ABSTRACT: Respiration monitoring is vital for human health assessment. Humidity sensing is a promising way to establish a relationship between human respiration and electrical signal. This paper presents a polyimide-based film bulk acoustic resonator (PI-FBAR) humidity sensor operating in resonant frequency and reflection coefficient S₁₁ dual-parameter with high sensitivity and stability, and it is applied in real-time human respiration monitoring for the first time. Both these two parameters can be used to sense different breathing conditions, such as normal breathing and deep breathing, and breathing with different rates such as normal breathing, slow breathing, apnea, and fast breathing. Experimental results also indicate that the proposed humidity sensor has potential applications in

SUBMITTER: Zhu Y 

PROVIDER: S-EPMC9143046 | biostudies-literature | 2022 May

REPOSITORIES: biostudies-literature