Manufacturing of Complex Silicon-Carbon Structures: Exploring Si_xC_y Materials.

ABSTRACT: This paper reports on the manufacturing of complex three-dimensional Si/C structures via a chemical vapor deposition method. The structure and properties of the grown materials were characterized using various techniques including scanning electron microscopy, aberration-corrected transmission electron microscopy, confocal Raman spectroscopy, and X-ray photoelectron spectroscopy. The spectroscopy results revealed that the grown materials were composed of micro/nanostructures with various compositions and dimensions. These included two-dimensional silicon carbide (SiC), cubic silicon, and various SiC polytypes. The coexistence of these phases at the nano-level and their interfaces can benefit several Si/C-based applications ranging from ceramics and structural applications to power electron

SUBMITTER: Oglesby S 

PROVIDER: S-EPMC9146070 | biostudies-literature | 2022 May

REPOSITORIES: biostudies-literature