Automating ALCHEMI at the nano-scale using software compatible with PC-controlled transmission electron microscopy.

ABSTRACT: Atom location by channeling-enhanced microanalysis (ALCHEMI) is a technique to obtain atom-site-specific information on constituent elements in a crystalline sample by acquiring a set of core electron transition spectra while tilting the incident beam. This methodology has been extended to a more quantitative technique called high-angular-resolution electron-channeled X-ray/electron spectroscopy (HARECXS/HARECES). There is a growing demand for analyzing smaller areas, such as small particles and multilayers. However, the minimum size of a region of interest probed by the present hardware-assisted automated HARECXS/HARECES scheme is limited to no smaller than 1 µm, not only by the size of the electron probe and its convergence angle but also by the movement of the probe position associated

SUBMITTER: Ishizuka A 

PROVIDER: S-EPMC9172042 | biostudies-literature | 2022 Jun

REPOSITORIES: biostudies-literature