Tailoring electron beams with high-frequency self-assembled magnetic charged particle micro optics.

ABSTRACT: Tunable electromagnets and corresponding devices, such as magnetic lenses or stigmators, are the backbone of high-energy charged particle optical instruments, such as electron microscopes, because they provide higher optical power, stability, and lower aberrations compared to their electric counterparts. However, electromagnets are typically macroscopic (super-)conducting coils, which cannot generate swiftly changing magnetic fields, require active cooling, and are structurally bulky, making them unsuitable for fast beam manipulation, multibeam instruments, and miniaturized applications. Here, we present an on-chip microsized magnetic charged particle optics realized via a self-assembling micro-origami process. These micro-electromagnets can generate alternating magnetic fields of about ±1

SUBMITTER: Huber R 

PROVIDER: S-EPMC9184583 | biostudies-literature | 2022 Jun

REPOSITORIES: biostudies-literature