Highly Responsive Pd-Decorated MoO₃ Nanowall H₂ Gas Sensors Obtained from In-Situ-Controlled Thermal Oxidation of Sputtered MoS₂ Films.

ABSTRACT: Among transition metal oxides, MoO₃ is a promising material due to its layered structure and different oxidation states, making it suitable for different device applications. One of the methods used to grow MoO₃ is radio frequency magnetron sputtering (RFMS), which is the most compatible method in industry. However, obtaining nanostructures by RFMS for metal oxides is challenging because of compact morphology film formation. In this study, α-MoO₃ with vertical nanowalls is obtained by a two-step process; deposition of magnetron-sputtered MoS₂ vertical nanowalls and postoxidation of these structures without changing the morphology. In situ transmittance and electrical measurements are performed to control the oxidation process, which shed light on

SUBMITTER: Mobtakeri S 

PROVIDER: S-EPMC9185678 | biostudies-literature | 2022 Jun

REPOSITORIES: biostudies-literature