Light Modulation in Silicon Photonics by PZT Actuated Acoustic Waves.

ABSTRACT: Tailoring the interaction between light and sound has opened new possibilities in photonic integrated circuits (PICs) that range from achieving quantum control of light to high-speed information processing. However, the actuation of sound waves in Si PICs usually requires integration of a piezoelectric thin film. Lead zirconate titanate (PZT) is a promising material due to its strong piezoelectric and electromechanical coupling coefficient. Unfortunately, the traditional methods to grow PZT on silicon are detrimental for photonic applications due to the presence of an optical lossy intermediate layer. In this work, we report integration of a high quality PZT thin film on a silicon-on-insulator (SOI) photonic chip using an optically transparent buffer layer. We demonstrate acousto-optic mod

SUBMITTER: Ansari I 

PROVIDER: S-EPMC9205428 | biostudies-literature | 2022 Jun

REPOSITORIES: biostudies-literature