Simple sacrificial-layer-free microfabrication processes for air-cavity Fresnel acoustic lenses (ACFALs) with improved focusing performance.

ABSTRACT: Focused ultrasound (FUS) is a powerful tool widely used in biomedical therapy and imaging as well as in sensors and actuators. Conventional focusing techniques based on curved surfaces, metamaterial structures, and multielement phased arrays either present difficulties in massively parallel manufacturing with high precision or require complex drive electronics to operate. These difficulties have been addressed by microfabricated self-focusing acoustic transducers (SFATs) with Parylene air-cavity Fresnel acoustic lenses (ACFALs), which require a time-demanding step in removing the sacrificial layer. This paper presents three new and improved types of ACFALs based on polydimethylsiloxane (PDMS), an SU-8/PDMS bilayer, and SU-8, which are manufactured through simple sacrificial-layer-free micr

SUBMITTER: Tang Y 

PROVIDER: S-EPMC9256634 | biostudies-literature | 2022

REPOSITORIES: biostudies-literature