Fabrication of Three-Dimensionally Deformable Metal Structures Using Precision Electroforming.

ABSTRACT: It is difficult to fabricate three-dimensional structures using semiconductor-process technology, because it is based on two-dimensional layered structure fabrication and the etching of thin films. In this study, we fabricated metal structures that can be dynamically deformed from two-dimensional to three-dimensional shapes by combining patterning using photolithography with electroforming technology. First, a resist structure was formed on a Cu substrate. Then, using a Ni sulfamate electroforming bath, a Ni structure was formed by electroforming the fabricated resist structure. Finally, the resist structure was removed to release the Ni structure fabricated on the substrate, and electroforming was used to Au-plate the entire surface. Scanning-electron microscopy revealed that the structur

SUBMITTER: Kumamoto S 

PROVIDER: S-EPMC9315991 | biostudies-literature | 2022 Jun

REPOSITORIES: biostudies-literature