Ontology highlight
ABSTRACT:
SUBMITTER: Kumamoto S
PROVIDER: S-EPMC9315991 | biostudies-literature | 2022 Jun
REPOSITORIES: biostudies-literature
Kumamoto Seitaro S Fukuyama Souichiro S Nagano Seiya S Yasuda Keiichiro K Kitamura Yusuke Y Iwatsuki Masaaki M Baba Hideo H Ihara Toshihiro T Nakanishi Yoshitaka Y Nakashima Yuta Y
Micromachines 20220630 7
It is difficult to fabricate three-dimensional structures using semiconductor-process technology, because it is based on two-dimensional layered structure fabrication and the etching of thin films. In this study, we fabricated metal structures that can be dynamically deformed from two-dimensional to three-dimensional shapes by combining patterning using photolithography with electroforming technology. First, a resist structure was formed on a Cu substrate. Then, using a Ni sulfamate electroformi ...[more]